US Patent 10679885 Substrate support assembly with deposited surface features
Patent 10679885 was granted and assigned to Applied Materials on June, 2020 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 13, 2018
0
Date of Patent
June 9, 2020
0
Patent Applicant
Patent Application Number
16007977
0
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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