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US Patent 10626500 Showerhead design

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Edits on 25 May, 2023
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edited on 25 May, 2023
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=106265000
Edits on 25 Apr, 2023
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Infobox
Is a
Patent
Patent
0
Patent Applicant
Applied Materials
Applied Materials
0
Current Assignee
Applied Materials
Applied Materials
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
106265000
Date of Patent
April 21, 2020
0
Patent Application Number
162920780
Date Filed
March 4, 2019
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=106265000
Patent Citations
‌
US Patent 10221483 Showerhead design
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Patent Citations Received
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US Patent 10808315 Substrate processing apparatus having exhaust gas decomposer, and exhaust gas processing method therefor
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US Patent 10934621 Gas injection module, substrate processing apparatus, and method of fabricating semiconductor device using the same
0
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US Patent 11268192 Thin film processing apparatus and thin film processing method
0
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US Patent 11371142 Substrate processing apparatus having exhaust gas decomposer, and exhaust gas processing method therefor
0
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US Patent 11384433 Gas injection module, substrate processing apparatus, and method of fabricating semiconductor device using the same
0
Patent Primary Examiner
‌
Rudy Zervigon
0
Edits on 13 Jul, 2022
"update inverses"
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edited on 29 Jun, 2022
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"Entity importer update"
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edited on 8 Jun, 2022
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Infobox (+1 properties)
Infobox
Website URL
https://pdfpiw.uspto.gov/.piw?Docid=10626500
Edits on 9 Mar, 2022
"update inverses"
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Golden AI
edited on 9 Mar, 2022
Edits made to:
Infobox (+1 properties)
Infobox
Patent citations received
‌
US Patent 11268192 Thin film processing apparatus and thin film processing method
Edits on 10 Feb, 2022
"update inverses"
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Golden AI
edited on 10 Feb, 2022
Edits on 7 Feb, 2022
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edited on 7 Feb, 2022
Edits on 2 Feb, 2022
"Created via: Entity Importer"
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created this topic on 2 Feb, 2022
Edits made to:
Infobox (+10 properties)
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 US Patent 10626500 Showerhead design

Infobox
Is a
Patent
Patent
Patent applicant
Applied Materials
Applied Materials
Current assignee
Applied Materials
Applied Materials
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
10626500
Date of patent
April 21, 2020
Patent application number
16292078
Date Filed
March 4, 2019
Patent citations
‌
US Patent 10221483 Showerhead design
Patent primary examiner
‌
Rudy Zervigon

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