US Patent 10622224 Precleaning chamber and plasma processing apparatus
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Patent Number
106222240
Date of Patent
April 14, 2020
0Patent Application Number
155297090
Date Filed
November 25, 2015
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US Patent 10622224 Precleaning chamber and plasma processing apparatus
Infobox
Is a
Patent jurisdiction
Patent number
10622224
Date of patent
April 14, 2020
Patent application number
15529709
Date Filed
November 25, 2015
Patent primary examiner
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