US Patent 10580667 Light-irradiation heat treatment method and heat treatment apparatus
Patent 10580667 was granted and assigned to Screen Holdings on March, 2020 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 29, 2017
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Date of Patent
March 3, 2020
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Patent Applicant
Patent Application Number
15638068
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Patent Inventor Names
Yasuaki Kondo
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Shinichi Kato
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Shinji Miyawaki
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Takayuki Aoyama
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Akitsugu Ueda
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Hideaki Tanimura
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Hikaru Kawarazaki
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Kazuhiko Fuse
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Masashi Furukawa
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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