US Patent 10580618 Multi-level pulsing of DC and RF signals
Patent 10580618 was granted and assigned to Lam Research on March, 2020 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
May 1, 2019
0
Date of Patent
March 3, 2020
0
Patent Applicant
Patent Application Number
16400733
0
Patent Inventor Names
Ying Wu
0
Alex Paterson
0
Juline Shoeb
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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