US Patent 10573561 Formation of stacked nanosheet semiconductor devices
Is a
Date Filed
May 31, 2019
0
Date of Patent
February 25, 2020
0
Patent Application Number
16428026
0
Patent Inventor Names
Peng Xu
0
Heng Wu
0
Juntao Li
0
Kangguo Cheng
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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