US Patent 10539537 Thin film bulk acoustic resonator with signal enhancement
Patent 10539537 was granted and assigned to Qorvo on January, 2020 by the United States Patent and Trademark Office.
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Patent abstract
Sensitivity of thin film bulk acoustic resonance (TFBAR) sensors is enhanced by mass amplification and operating a high frequency.
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Patent Inventor Names
Ian Robert Harmon0
Michael Salvati0
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Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
105395370
Date of Patent
January 21, 2020
0Patent Application Number
162853040
Date Filed
February 26, 2019
0Patent Primary Examiner
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US Patent 10539537 Thin film bulk acoustic resonator with signal enhancement
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
10539537
Date of patent
January 21, 2020
Patent application number
16285304
Date Filed
February 26, 2019
Patent primary examiner
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