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US Patent 10533833 Method and apparatus for characterising instrument error

Patent 10533833 was granted and assigned to Taylor Hobson on January, 2020 by the United States Patent and Trademark Office.

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Patent

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Patent Applicant
Taylor Hobson
Taylor Hobson
Current Assignee
Taylor Hobson
Taylor Hobson
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
10533833
Date of Patent
January 14, 2020
Patent Application Number
15309012
Date Filed
April 27, 2015
Patent Primary Examiner
‌
Tung S Lau
Patent abstract

A method for characterising instrument error in a surface measurement instrument, comprising obtaining first calibration measurement data representing a known surface form of a first reference object and obtaining second calibration measurement data representing a known surface form of a second reference object. At least a portion of the second calibration measurement data represents a measurement range that overlaps with at least a portion of a measurement range of the first calibration measurement data. A common error function is obtained that characterises the instrument error.

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