US Patent 10527951 Compound imaging metrology targets
Patent 10527951 was granted and assigned to KLA-Tencor on January, 2020 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 1, 2016
Date of Patent
January 7, 2020
Patent Applicant
Patent Application Number
15057723
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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