US Patent 10510602 Methods of producing self-aligned vias
Is a
Date Filed
August 29, 2018
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Date of Patent
December 17, 2019
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Patent Applicant
Patent Application Number
16116412
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Patent Inventor Names
Yung-Chen Lin
0
Qingjun Zhou
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Uday Mitra
0
Ying Zhang
0
Abhijit Basu Mallick
0
He Ren
0
Ho-yung David Hwang
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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