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US Patent 10465288 Nozzle for uniform plasma processing

Patent 10465288 was granted and assigned to Applied Materials on November, 2019 by the United States Patent and Trademark Office.

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Patent abstract

A nozzle for uniform plasma processing comprises an inlet portion and an outlet portion. The inlet portion has a side surface substantially parallel to a vertical axis. The inlet portion comprises a plurality of gas channels. The outlet portion is coupled to the inlet portion. The outlet portion comprises a plurality of outlets. At least one of the outlets is at an angle other than a right angle relative to the vertical axis.

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Patent Citations Received
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US Patent 11802341 PE-CVD apparatus and method
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Patent Inventor Names
Cheng Sun0
Eng Sheng Peh0
Rohit Mishra0
Shoju Vayyapron0
Siva Suri Chandra Rao Bhesetti0
Sriskantharajah Thirunavukarasu0
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Infobox
Is a
Patent
Patent
0
Patent Applicant
Applied Materials
Applied Materials
0
Current Assignee
Applied Materials
Applied Materials
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
104652880
Date of Patent
November 5, 2019
0
Patent Application Number
144613180
Date Filed
August 15, 2014
0
Patent Citations Received
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US Patent 10943768 Modular high-frequency source with integrated gas distribution
0
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US Patent 11501955 Modular high-frequency source with integrated gas distribution
0
Patent Primary Examiner
‌
Rudy Zervigon
0
Edits on 16 Nov, 2022
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edited on 16 Nov, 2022
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Patent Citations Received
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US Patent 11501955 Modular high-frequency source with integrated gas distribution
0
Edits on 25 Sep, 2022
"update citations for inverse infoboxes"
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Patent citations received
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US Patent 10943768 Modular high-frequency source with integrated gas distribution
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 US Patent 10465288 Nozzle for uniform plasma processing

Infobox
Is a
Patent
Patent
Patent applicant
Applied Materials
Applied Materials
Current assignee
Applied Materials
Applied Materials
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
10465288
Date of patent
November 5, 2019
Patent application number
14461318
Date Filed
August 15, 2014
Patent primary examiner
‌
Rudy Zervigon

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