US Patent 10446685 High-electron-mobility transistors with heterojunction dopant diffusion barrier

III-V compound semiconductor devices, such transistors, may be formed in active regions of a III-V semiconductor material disposed over a silicon substrate. A heterojunction between an active region of III-V semiconductor and the substrate provides a diffusion barrier retarding diffusion of silicon from the substrate into III-V semiconductor material where the silicon might otherwise behave as an electrically active amphoteric contaminate. In some embodiments, the heterojunction is provided within a base portion of a sub-fin disposed between the substrate and a fin containing a transistor channel region. The heterojunction positioned closer to the substrate than active fin region ensures thermal diffusion of silicon atoms is contained away from the active region of a III-V finFET.