Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Paul James Scott0
Date of Patent
October 15, 2019
0Patent Application Number
135042140
Date Filed
November 1, 2010
0Patent Primary Examiner
Patent abstract
A method of characterizing the surface of an aspheric diffractive structure includes using a metrological apparatus to perform a measurement on the surface of the structure so as to provide a measurement profile representing the z-direction deviations of the surface of the structure; determining parameters relating to the aspheric and diffractive components of the aspheric diffractive structure; producing data having the determined parameters; and comparing the produced data with the measurement profile to determine residual error data.
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