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US Patent 10429320 Method for auto-learning tool matching

Patent 10429320 was granted and assigned to KLA-Tencor on October, 2019 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
0
Current Assignee
KLA-Tencor
KLA-Tencor
0
Date Filed
May 5, 2014
0
Date of Patent
October 1, 2019
0
Patent Applicant
KLA-Tencor
KLA-Tencor
0
Patent Application Number
14270148
0
Patent Citations Received
‌
US Patent 10732516 Process robust overlay metrology based on optical scatterometry
Patent Inventor Names
Matthew Manzer
0
Christopher Lee
0
Francis Raquel
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
10429320
0
Patent Primary Examiner
‌
Andrew Schechter
0

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