‌

US Patent 10418225 Distributed electrode array for plasma processing

Patent 10418225 was granted and assigned to Applied Materials on September, 2019 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
1
Current Assignee
Applied Materials
Applied Materials
1
Date Filed
August 21, 2018
1
Date of Patent
September 17, 2019
1
Patent Applicant
Applied Materials
Applied Materials
1
Patent Application Number
16107855
1
Patent Citations Received
‌
US Patent 11881384 Monolithic modular microwave source with integrated process gas distribution
2
‌
US Patent 10636624 Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal
Patent Inventor Names
Michael R. Rice
1
Yue Guo
1
James D. Carducci
1
Kartik Ramaswamy
1
Kenneth S. Collins
1
Olga Regelman
1
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
1
Patent Number
10418225
1
Patent Primary Examiner
‌
Dedei K Hammond
1

Find more entities like US Patent 10418225 Distributed electrode array for plasma processing

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
Open Query Tool
Access by API
Golden Query Tool
Golden logo
By using this site, you agree to our Terms of Service.