US Patent 10379445 Metrology method, target and substrate
Is a
Date Filed
October 30, 2018
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Date of Patent
August 13, 2019
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Patent Application Number
16174398
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Patent Citations
Patent Citations Received
Patent Inventor Names
Arie Jeffrey Den Boef
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Martin Ebert
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Martin Jacobus Johan Jak
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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