Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Woo-Jin Lee0
Akiko Kobayashi0
Akira Shimizu0
Nobuyoshi Kobayashi0
Date of Patent
August 13, 2019
0Patent Application Number
126183550
Date Filed
November 13, 2009
0Patent Citations
Patent Primary Examiner
Patent abstract
A method of forming an insulation film by alternating multiple times, respectively, a process of adsorbing a precursor onto a substrate and a process of treating the adsorbed surface using reactant gas and a plasma, wherein a plasma is applied in the process of supplying the precursor.
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