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US Patent 10354831 Charged particle inspection method and charged particle system

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Date Filed
April 25, 2016
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Date of Patent
July 16, 2019
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Patent Application Number
15137796
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Patent Citations Received
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US Patent 12119204 Particle beam system and the use thereof for flexibly setting the current intensity of individual particle beams
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US Patent 11645740 Method for detector equalization during the imaging of objects with a multi-beam particle microscope
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US Patent 11657999 Particle beam system and method for the particle-optical examination of an object
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US Patent 11935721 System comprising a multi-beam particle microscope and method for operating the same
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US Patent 12094683 Method for operating a multi-beam particle beam microscope
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US Patent 11521827 Method of imaging a 2D sample with a multi-beam particle microscope
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US Patent 11239053 Charged particle beam system and method
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US Patent 11239054 Multi-beam particle beam system
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US Patent 11562881 Charged particle beam system
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US Patent 11562880 Particle beam system for adjusting the current of individual particle beams
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Patent Inventor Names
Rainer Knippelmeyer
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Stefan Schubert
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Thomas Kemen
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
10354831
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Patent Primary Examiner
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Phillip A Johnston
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