Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Xinkang Tian0
Yan Sun0
Ching-Ling Meng0
Date of Patent
July 9, 2019
Patent Application Number
15611290
Date Filed
June 1, 2017
Patent Citations Received
...
Patent Primary Examiner
Patent abstract
Provided is a method, system, and apparatus for inspecting a substrate. The method comprises illuminating the substrate with a singular laser beam, the singular laser beam forming an illuminated spot on the substrate and a bright fringe at a surface of the substrate, the bright fringe extending over at least a portion of the illuminated spot, and detecting, by an optical detection system, scattered light from nano-defects present on the substrate within the illuminated spot.
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