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US Patent 10325759 Multiple control modes

Patent 10325759 was granted and assigned to Lam Research on June, 2019 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Current Assignee
Lam Research
Lam Research
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Date Filed
December 5, 2016
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Date of Patent
June 18, 2019
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Patent Applicant
Lam Research
Lam Research
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Patent Application Number
15369110
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Patent Citations Received
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US Patent 10971335 Radio frequency (RF) power monitoring device and plasma enhanced (PE) system including the same
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US Patent 11594397 Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system
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US Patent 12125677 High-frequency power supply apparatus
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US Patent 10879044 Auxiliary circuit in RF matching network for frequency tuning assisted dual-level pulsing
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US Patent 10991550 Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system
Patent Inventor Names
Eric Allen Hudson
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Ryan Bise
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John C. Valcore, Jr.
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
10325759
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Patent Primary Examiner
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Dion Ferguson
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