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US Patent 10297513 Stacked vertical NFET and PFET
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Is a
Patent
Date Filed
December 29, 2017
Date of Patent
May 21, 2019
Patent Application Number
15858267
Patent Citations
US Patent 10090204 Vertical FINFET structure and methods of forming same
US Patent 10141448 Vertical FETs with different gate lengths and spacer thicknesses
Patent Citations Received
US Patent 11978796 Contact and isolation in monolithically stacked VTFET
0
US Patent 11756961 Staggered stacked vertical crystalline semiconducting channels
US Patent 11769830 Semiconductor devices
US Patent 11956939 Static random access memory using vertical transport field effect transistors
0
US Patent 10755937 Vertical transistor having a silicided bottom and method for fabricating thereof
US Patent 10964603 Hybrid gate stack integration for stacked vertical transport field-effect transistors
US Patent 10971367 Method for fabricating vertical transistor having a silicided bottom
US Patent 11075202 Bottom fin trim isolation aligned with top gate for stacked device architectures
US Patent 11251182 Staggered stacked vertical crystalline semiconducting channels
US Patent 11678475 Static random access memory using vertical transport field effect transistors
0
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
10297513
Patent Primary Examiner
Mamadou L Diallo
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