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US Patent 10293377 Micromachined ultrasonic transducers with a slotted membrane structure

Patent 10293377 was granted and assigned to Chirp Microsystems on May, 2019 by the United States Patent and Trademark Office.

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Patent abstract

A piezoelectric micromachined ultrasonic transducer (PMUT) device includes a substrate having an opening therethrough and a membrane attached to the substrate over the opening. A portion of the membrane that overlies the opening is divided into a plurality of cantilevers that are mechanically coupled so that the cantilevers resonate at a common frequency.

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