US Patent 10283422 Ion implantation method and ion implantation apparatus
Patent 10283422 was granted and assigned to Sumitomo Heavy Industries on May, 2019 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 17, 2017
0
Date of Patent
May 7, 2019
0
Patent Applicant
Patent Application Number
15816838
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Patent Citations Received
Patent Inventor Names
Masaki Ishikawa
0
Hideki Morikawa
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Hiroyuki Kariya
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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