Is a
Patent attributes
Patent Applicant
0
Current Assignee
0
Patent Jurisdiction
Patent Number
Patent Inventor Names
Masayuki Watanabe0
Minoru Ito0
Seiji Hashiguchi0
Date of Patent
April 16, 2019
0Patent Application Number
155979210
Date Filed
May 17, 2017
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A vacuum valve placed between a vacuum vessel and a vacuum pump to adjust a valve opening degree using an operating fluid includes a packing mounted in a recessed groove of a piston. The packing is provided with a contact portion on a radially inner side and a contact portion on a radially outer side, and a slide-contact portion contacting with an inner peripheral surface of a cylinder. A portion between the contact portion and the slide-contact portion has a thin thickness.
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