US Patent 10241269 Grating couplers with multiple configurations
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Patent abstract
The present disclosure relates to semiconductor structures and, more particularly, to grating couplers with multiple configurations and methods of manufacture. A structure includes: a grating coupler having a sawtooth configuration provided over a semiconductor slab; and a back end of line (BEOL) stack over the sawtooth configuration of the grating coupler.
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Patent Inventor Names
Ajey Poovannummoottil Jacob0
Yusheng Bian0
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Patent Jurisdiction
Patent Number
102412690
Date of Patent
March 26, 2019
0Patent Application Number
159742520
Date Filed
May 8, 2018
0Patent Citations Received
Patent Primary Examiner
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US Patent 10241269 Grating couplers with multiple configurations
Infobox
Is a
Patent jurisdiction
Patent number
10241269
Date of patent
March 26, 2019
Patent application number
15974252
Date Filed
May 8, 2018
Patent primary examiner
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