US Patent 10234425 Thin film bulk acoustic resonator with signal enhancement
Patent 10234425 was granted and assigned to Qorvo on March, 2019 by the United States Patent and Trademark Office.
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Patent abstract
Sensitivity of thin film bulk acoustic resonance (TFBAR) sensors is enhanced by mass amplification and operating a high frequency.
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Patent Inventor Names
Ian Robert Harmon0
Michael Salvati0
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Patent Number
102344250
Date of Patent
March 19, 2019
0Patent Application Number
148503530
Date Filed
September 10, 2015
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US Patent 10234425 Thin film bulk acoustic resonator with signal enhancement
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
10234425
Date of patent
March 19, 2019
Patent application number
14850353
Date Filed
September 10, 2015
Patent primary examiner
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