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US Patent 10217614 Ceramic gas distribution plate with embedded electrode

Patent 10217614 was granted and assigned to Lam Research on February, 2019 by the United States Patent and Trademark Office.

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Patent abstract

A gas distribution plate for a substrate processing system includes a ceramic lower portion of the gas distribution plate including a plurality of ceramic green sheets. A ceramic upper portion of the gas distribution plate includes a plurality of ceramic green sheets. An electrode is printed on at least one of an upper surface of the ceramic lower portion and a lower surface of the ceramic upper portion using metal screen printing. A first plurality of through holes is machined through the ceramic lower portion and the ceramic upper portion of the gas distribution plate prior to sintering.

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Jeremy Tucker0
Ramkishan Rao Lingampalli0
Tony Kaushal0
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Patent Citations Received
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US Patent 11682560 Systems and methods for hafnium-containing film removal
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US Patent 11417534 Selective material removal
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US Patent 11594428 Low temperature chuck for plasma processing systems
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