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US Patent 10217608 Switching circuit for RF currents

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Date Filed
August 3, 2017
Date of Patent
February 26, 2019
Patent Application Number
15667951
Patent Citations Received
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US Patent 11430635 Precise plasma control system
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US Patent 11791134 Impedance adjustment device
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US Patent 11387078 Impedance matching device and impedance matching method
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US Patent 11404246 Nanosecond pulser bias compensation with correction
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US Patent 11527383 Nanosecond pulser RF isolation for plasma systems
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US Patent 11532457 Precise plasma control system
‌
US Patent 11545954 Impedance adjustment device
‌
US Patent 11552612 Impedance adjustment device and impedance adjustment method
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US Patent 10734196 Impedance matching device
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US Patent 10778209 Pin diode driving circuit and threshold value determination method
•••
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
10217608
Patent Primary Examiner
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An T Luu

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