US Patent 10204817 Substrate transport apparatus
Patent 10204817 was granted and assigned to Brooks Automation on February, 2019 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 12, 2017
Date of Patent
February 12, 2019
Patent Applicant
Patent Application Number
15702436
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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