US Patent 10192721 High-frequency power source
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Patent abstract
[OBJECT] To provide a radio-frequency power source capable of outputting radio-frequency power having a desired waveform changing at high speed.
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Patent Inventor Names
Yoshinobu Kasai0
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Patent Number
101927210
Date of Patent
January 29, 2019
0Patent Application Number
155346780
Date Filed
December 9, 2015
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US Patent 10192721 High-frequency power source
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Is a
Patent jurisdiction
Patent number
10192721
Date of patent
January 29, 2019
Patent application number
15534678
Date Filed
December 9, 2015
Patent primary examiner
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