US Patent 10181185 Image based specimen process control
Patent 10181185 was granted and assigned to KLA-Tencor on January, 2019 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
January 9, 2017
Date of Patent
January 15, 2019
Patent Applicant
Patent Application Number
15402197
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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