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US Patent 10176966 Edge detection system
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Patent
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Date Filed
February 8, 2018
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Date of Patent
January 8, 2019
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Patent Application Number
15892080
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Patent Citations Received
US Patent 11996265 System and method for generating and analyzing roughness measurements and their use for process monitoring and control
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US Patent 11355306 System and method for generating and analyzing roughness measurements and their use for process monitoring and control
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US Patent 11361937 System and method for generating and analyzing roughness measurements and their use for process monitoring and control
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US Patent 11380516 System and method for generating and analyzing roughness measurements and their use for process monitoring and control
US Patent 11508546 System and method for low-noise edge detection and its use for process monitoring and control
US Patent 11521825 System and method for predicting stochastic-aware process window and yield and their use for process monitoring and control
US Patent 10488188 System and method for removing noise from roughness measurements
US Patent 10510509 Edge detection system
US Patent 10522322 System and method for generating and analyzing roughness measurements
US Patent 10648801 System and method for generating and analyzing roughness measurements and their use for process monitoring and control
•••
Patent Inventor Names
Chris Mack
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Patent Jurisdiction
United States Patent and Trademark Office
0
Patent Number
10176966
0
Patent Primary Examiner
Nicole Ippolito
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