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US Patent 10173812 Wafer container with latching mechanism for large diameter wafers

Patent 10173812 was granted and assigned to Entegris on January, 2019 by the United States Patent and Trademark Office.

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Is a
Patent
Patent

Patent attributes

Patent Applicant
Entegris
Entegris
Current Assignee
Entegris
Entegris
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
10173812
Date of Patent
January 8, 2019
Patent Application Number
14263500
Date Filed
April 28, 2014
Patent Citations Received
‌
US Patent 11398395 Substrate container with latching mechanism having two cam profiles
Patent Primary Examiner
‌
Kristina R Fulton
Patent abstract

A wafer container with a latch mechanism that provides sealing for large wafer containers, such as for 450 mm wafers, accomplishes secure door closing and latching with reduced torque requirements for rotating the central rotatable cam plate. In various embodiments, a camming slot formed in the rotatable cammed plate is arcuate and defined by opposing cam surfaces which are selectively engaged by a cam follower, such as a roller, attached to a proximal end of a latch arm. The roller can include unitary axle portions that snap into the proximal end of the latch arm and is supported at both axial ends of the roller. The proximal end of the latch arm can include parallel extensions separated by a gap, and have guide in surfaces to deflect the extensions as the axle portions of the roller are forced into position thereby seating the roller at both axial ends.

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