US Patent 10157730 Control of impedance of RF delivery path
Patent 10157730 was granted and assigned to Lam Research on December, 2018 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 27, 2016
Date of Patent
December 18, 2018
Patent Applicant
Patent Application Number
15194452
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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