Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
December 11, 2018
Patent Application Number
15527098
Date Filed
November 11, 2015
Patent Citations Received
Patent Primary Examiner
Patent abstract
A system is described that combines spectropolarimetry with scatterometry. The system uses an annular mirror and liquid crystal devices to control the angle of the incident light cone, the polarization and wavelength, an imaging setup and one or more video cameras so that spectroseopic-polarimetric-scatterometric images can be grabbed rapidly. The system is also designed to incorporate additional imaging modes such as interference, phase contrast, fluorescence and Raman spectropolarimetric imaging.
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