US Patent 10147597 Turbulent flow spiral multi-zone precursor vaporizer
Patent 10147597 was granted and assigned to Lam Research on December, 2018 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 14, 2017
Date of Patent
December 4, 2018
Patent Applicant
Patent Application Number
15704151
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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