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US Patent 10139228 Micromechanical sensor of angular velocity
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Patent
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Date Filed
February 5, 2016
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Date of Patent
November 27, 2018
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Patent Applicant
Murata Manufacturing
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Patent Application Number
15016751
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Patent Citations Received
US Patent 11415418 Out-of-plane sensing gyroscope robust to external acceleration and rotation
US Patent 10466053 Out-of-plane sensing gyroscope robust to external acceleration and rotation
US Patent 11525680 Angular rate sensor with centrally positioned coupling structures
Patent Inventor Names
Tommi Piirainen
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
10139228
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Patent Primary Examiner
John Chapman, Jr.
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