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US Patent 10138553 Vacuum treatment apparatus

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Date Filed
May 25, 2016
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Date of Patent
November 27, 2018
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Patent Application Number
15164262
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Patent Citations Received
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US Patent 12080571 Substrate processing module and method of moving a workpiece
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US Patent 10998209 Substrate processing platforms including multiple processing chambers
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US Patent 11600507 Pedestal assembly for a substrate processing chamber
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US Patent 11610799 Electrostatic chuck having a heating and chucking capabilities
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US Patent 11674227 Symmetric pump down mini-volume with laminar flow cavity gas injection for high and low pressure
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US Patent 11749542 Apparatus, system, and method for non-contact temperature monitoring of substrate supports
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US Patent 12002668 Thermal management hardware for uniform temperature control for enhanced bake-out for cluster tool
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Patent Inventor Names
Bart Scholte Von Mast
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Rogier Lodder
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Rolf Bazlen
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Wolfgang Rietzler
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Daniel Rohrer
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
10138553
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Patent Primary Examiner
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Ronald P Jarrett
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