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US Patent 10119816 Low drift reference for laser radar

Patent 10119816 was granted and assigned to Nikon Metrology on November, 2018 by the United States Patent and Trademark Office.

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Patent
Patent
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Patent attributes

Patent Applicant
Nikon Metrology
Nikon Metrology
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Current Assignee
Nikon Metrology
Nikon Metrology
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
101198160
Patent Inventor Names
Anthony R. Slotwinski0
Mina A. Rezk0
Date of Patent
November 6, 2018
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Patent Application Number
138406060
Date Filed
March 15, 2013
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Patent Citations Received
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US Patent D1032607 Controller for electronic grade rod
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US Patent D1038783 Electronic grade rod
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US Patent D1038784 Active extension for electronic grade rod
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US Patent 11674801 Sensor rod assembly for measuring elevations
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US Patent 11674802 Sensor rod assembly for measuring elevations
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US Patent 11675148 Optical path displacement compensation-based transmission optical power stabilization assembly
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Patent Primary Examiner
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Samantha K Abraham
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Patent abstract

Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.

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