US Patent 10115609 Separation and regeneration apparatus and substrate processing apparatus
Patent 10115609 was granted and assigned to Tokyo Electron on October, 2018 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 11, 2015
0
Date of Patent
October 30, 2018
0
Patent Applicant
Patent Application Number
14644458
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Patent Citations Received
Patent Inventor Names
Takehiko Orii
0
Hiroki Ohno
0
Kazuyuki Mitsuoka
0
Takayuki Toshima
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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