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US Patent 10112205 Substrate processing apparatus and substrate processing method

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
Date Filed
July 29, 2016
Date of Patent
October 30, 2018
Patent Applicant
Screen Holdings
Screen Holdings
Patent Application Number
15223730
Patent Citations Received
‌
US Patent 10707109 Substrate processing apparatus
‌
US Patent 10529604 Substrate position adjustment method, storage medium and substrate treatment system
‌
US Patent 10627800 Substrate transport device, substrate processing apparatus including the substrate transport device, and substrate transport method
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
10112205
Patent Primary Examiner
‌
Laura Edwards

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