US Patent 10090147 Integrated system and method for source/drain engineering
Patent 10090147 was granted and assigned to Applied Materials on October, 2018 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 6, 2018
Date of Patent
October 2, 2018
Patent Applicant
Patent Application Number
15890117
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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