US Patent 10086511 Semiconductor manufacturing systems
Patent 10086511 was granted and assigned to Brooks Automation on October, 2018 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 30, 2013
Date of Patent
October 2, 2018
Patent Applicant
Patent Application Number
14014910
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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