Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
David Thompson1
Ziqing Duan1
Abhijit Basu Mallick1
Benjamin Schmiege1
Jeffrey W. Anthis1
Susmit Singha Roy1
Date of Patent
September 25, 2018
1Patent Application Number
157181481
Date Filed
September 28, 2017
1Patent Citations Received
...
Patent Primary Examiner
Patent abstract
Processing methods comprising selectively orthogonally growing a first material through a mask to provide an expanded first material are described. The mask can be removed leaving the expanded first material extending orthogonally from the surface of the first material. Further processing can create a self-aligned via.
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