US Patent 10083818 Auto frequency tuned remote plasma source
Patent 10083818 was granted and assigned to Applied Materials on September, 2018 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 23, 2015
Date of Patent
September 25, 2018
Patent Applicant
Patent Application Number
14863153
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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