US Patent 10074534 Ultra-conformal carbon film deposition
Patent 10074534 was granted and assigned to Applied Materials on September, 2018 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 28, 2017
Date of Patent
September 11, 2018
Patent Applicant
Patent Application Number
15636239
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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