Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Helin Huang0
Matthew Carnes0
Glenn Whitener0
Kevin P. Dockery0
Date of Patent
September 4, 2018
0Patent Application Number
149888910
Date Filed
January 6, 2016
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Described are compositions (e.g., slurries) useful in methods for chemical-mechanical processing (e.g. polishing or planarizing) a surface of a substrate that contains tungsten, the slurries containing abrasive particles, metal cation catalyst, phosphorus-containing zwitterionic compound, and optional ingredients such as oxidizer; also described are methods and substrates used or processed on combination with the compositions.
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