Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Edric Tong0
Zhepeng Cong0
Zhiyuan Ye0
Zuoming Zhu0
Anhthu Ngo0
Anzhong Chang0
Balasubramanian Ramachandran0
James Francis Mack0
...
Date of Patent
August 28, 2018
0Patent Application Number
146987930
Date Filed
April 28, 2015
0Patent Citations Received
Patent Primary Examiner
Patent abstract
In one embodiment, a susceptor for thermal processing is provided. The susceptor includes an outer rim surrounding and coupled to an inner dish, the outer rim having an inner edge and an outer edge. The susceptor further includes one or more structures for reducing a contacting surface area between a substrate and the susceptor when the substrate is supported by the susceptor. At least one of the one or more structures is coupled to the inner dish proximate the inner edge of the outer rim.
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