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US Patent 10052756 Industrial robot
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Patent
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Date Filed
October 21, 2015
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Date of Patent
August 21, 2018
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Patent Application Number
15523000
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Patent Citations Received
US Patent 10699930 Buffer chamber wafer heating mechanism and supporting robots
US Patent 10580681 Robotic apparatus and method for transport of a workpiece
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US Patent 11264258 Buffer chamber wafer heating mechanism and supporting robots
Patent Inventor Names
Yasuyuki Kitahara
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Tamotsu Kuribayashi
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
10052756
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Patent Primary Examiner
Gerald McClain
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