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Sylvia MacArthur
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Edits on 14 Dec, 2021
"Remove inverse infobox"
Golden AI
edited on 14 Dec, 2021
Edits made to:
Infobox
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-7
properties)
Infobox
Patent primary examiner of
US Patent 11170991 Plasma processing apparatus
US Patent 11171020 Substrate treatment apparatus
US Patent 11171022 Substrate treatment apparatus and method of manufacturing semiconductor device
US Patent 7241362 Substrate treatment method and substrate treatment apparatus
US Patent 7255771 Multiple zone carrier head with flexible membrane
US Patent 7282096 Arrangement comprising a support body and a substrate holder which is driven in rotation and gas-supported thereon
US Patent 11183435 Endpointing detection for chemical mechanical polishing based on spectrometry
Edits on 25 Nov, 2021
Golden AI
edited on 25 Nov, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 11183435 Endpointing detection for chemical mechanical polishing based on spectrometry
Edits on 23 Nov, 2021
Golden AI
edited on 23 Nov, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7282096 Arrangement comprising a support body and a substrate holder which is driven in rotation and gas-supported thereon
Golden AI
edited on 22 Nov, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7255771 Multiple zone carrier head with flexible membrane
Golden AI
edited on 22 Nov, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7241362 Substrate treatment method and substrate treatment apparatus
Edits on 11 Nov, 2021
Golden AI
edited on 11 Nov, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 11171022 Substrate treatment apparatus and method of manufacturing semiconductor device
Golden AI
edited on 11 Nov, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 11171020 Substrate treatment apparatus
Golden AI
edited on 11 Nov, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 11170991 Plasma processing apparatus
"Created via: Entity Importer"
Golden AI
created this topic on 11 Nov, 2021
Edits made to:
Infobox
(
+2
properties)
Sylvia MacArthur
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United States Patent and Trademark Office
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